Company: ASML, Wilton CT, USA

Industry: Manufacturing of Lithographic Scanners Used in the Production of Semiconductors

Role: Design Engineer for the Ultra Violet Level Sensor (UVLS)

Duration: September 2017 – July 2018

Overview: I joined ASML as a Mechanical Designer in the Handling, Transport, and Tooling Group. As such, during my time on UVLS as a designer, I worked predominantly on a tooling test stand that was used to qualify the Sensor before shipment. I became the competence on the test stand, and with the team we improved the repeatability of the test stand in measuring certain optical parameters (derived by Zernike values) by up to 25%. I also worked on other tools for the floor (storage tools, lift tools, alignment tools), and held design reviews with stakeholders from across the project. A specific design I worked on which I was proud of was in implementing a custom bearing slipper on a goniometer (radial adjustment stage) by using existing interfaces on the goniometer itself. There were proposals to create a separate tool to make the locking of the goniometer more robust, however I found a way to upgrade the existing locking mechanism through my custom bearing slipper design- this saved us both time and money in implementing the solution.

Unfortunately, I cannot disclose images and details of my design work. However, I will list out my key achievements.

Key Achievements:

• Enhanced CAD modeling skills in NX, and performed FEA for deformation and stress analysis regularly on designs I created; I also created technical drawings, and utilized PMI (Product and Manufacturing Information) dimensioning in the models
• Improved the repeatability for certain optical parameter measurements by up to 25% on a distortion test stand; the improvements included mapping the error profiles of the mechanical stages and controlling the measurement zones, updating the algorithms in the logic to remove “bugs”, and enforcing thermal settling times (which I tested and optimized) prior to taking the measurements
• Designed a custom bearing slipper for a radial stage using existing interfaces on the stage; this improved the locking accuracy of the stage and reduced drift over time significantly. The technicians went from having to recalibrate the stage once in every 5 uses to once in every 30 uses.